Delivery program

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# A B C D E F G H I J K L M N O P Q R S T U V W X Y Z

Article no.	Name
SLA5850	mass flow regulator
SLA5850S1BCF1C2A1	mass flow controller
SLA5853	mass flow regulator
SLA5853S2DAB2C2A1	mass flow regulator
SLA5853S2GAB2C2A1	mass flow regulator
SLA5853S2NAB2C2A1	mass flow regulator
SLA5863	Mass Flow Meters

Article details
Brand:	BROOKS
Article no.:	SLA5853S2GAB2C2A1
Article name:	mass flow regulator
Description:
LineDescription SLA5853 N2 2200 NLPM LineComments REF P/N SPECIAL Base Model SLA5853 REV B Max Press 1000 psig [69 BAR] Max Temperature 149F [65C] Temperature 20C Meter Material 316L SS Valve Type NC High DP Valve Seat Viton, O-Ring Viton Elect Conn 15-pin D-Conn Proc Conn Sz 1/2-in, Conn Type FNPT Fs Flow Rate 2200 NLPM Gas N2 Inl Pressure 1.5 MPaa Out Pressure 0.7 MPaa, Cal Ref Temp 0C Input Signal 4-20mA, Output Sig 4-20mA Comm Smart Emulation, Baudrate 19200 OutputEnh Std Response, PwrSplyIn 24 Vdc Cert Safe Area, Mtg Att [1] Horizontal base down Calibration [E] Single - HP Oem Cust Standard Brooks label Orifice Size 0.028 Orifice Restrictor Type LFE Restrictor Size Size code G N2 E. Gas Factor , N2_EQ 2200 NLPM CRN Province N/A ecNamePlateViscosity1 0.0178 Density1 0.0173 GM/CC SpecificHt1 1.0401 J/g K weight: 6KG/P HS: 90328900